An Online Meeting, January 20-22, 2021
Recent Developments in
High-Power Impulse Magnetron Sputtering
The 96th IUVSTA Workshop
REGISTRATION IS CLOSED!
About The Event
Scope of the meeting
This workshop, held on an online platform, will deal with recent development of high-power impulse magnetron sputtering (HiPIMS). It will provide a networking environment with oral presentations, poster presentations and exhibits. The virtual platform will allow you to interaction with the invited speakers and all other participants of the workshop.
Invited contributions
contributions
All non-invited scientific participants are offered the possibility to make a breakout room presentation. You will be assigned your own room where you can share your material in any form you like.
Exhibition
The workshop will give companies active in the field the possibility to present and interact with potential customers for a small fee. Contact the organizers for more information (contact@hipims.today) or register below, and we will contact you.
how?
We will use Zoom. Invited speakers, contributing presenter and exhibitors will be assigned their own breakout rooms during the time between the oral sessions. Participants will be able to move themselves between the rooms and have discussions in smaller groups. To be able to move between breakout rooms you need to use a desktop client or mobile app, version 5.3.0 or higher. The Zoom web client will not work.
The workshop is free of charge for scientists and engineers developing HiPIMS. A fee is applicable for exhibitors and salespersons.
Number of registrations: REGISTRATION IS CLOSED
- 17 invited speakers
- 15 contributed “breakout room” presentations
- 1 main sponsor (IUVSTA) and 4 other sponsors
- 4 exhibiting companies
- 290 participants in total
These Are
Our Speakers
Click the name of the speaker and you are coming to a site selected by the speaker.
The Program
Day 1
Wednesday, Jan 20, 2021
06:00 - 07:00 am UTC, Jan 20
Breakout room presentations, exhibits and mingling
07:00 - 08:00 am UTC, Jan 20
Opening of the Workshop
Ulf Helmersson, Tetsuhide SHIMIZU, Daniel Lundin
Invited presentations
An overview of the ground state particle behavior in HiPIMS discharge family – Nikolay Britun
Plasma characteristics in the near-floating substrate region in bipolar HiPIMS: Effect of pulsing configuration and magnetic balance degree – Vasile Tiron
08:00 - 09:00 am UTC, Jan 20
Breakout room presentations, exhibits and mingling
09:00 - 10:00 am UTC, Jan 20
Invited presentations
Time-resolved ion energy distributions and plasma potential in bipolar HiPIMS: effect of positive pulse length and delay – Tomáš Kozák
On the description of metal ion return in reactive high power impulse magnetron sputtering – Tomas Kubart
Impact of ionized species on the nucleation stage and stress development in sputtered thin films – Gregory Abadias
10:00 - 11:00 am UTC, Jan 20
Breakout room presentations, exhibits and mingling
Day 2
Thursday, Jan 21, 2021
06:00 - 07:00 am UTC, Jan 21
Breakout room presentations, exhibits and mingling
07:00 - 08:00 am UTC, Jan 21
Invited presentations
Ups and downs of HiPIMS for the deposition of nanocomposite hard thin films – Petr Vašina
Energy distributions in HIPIMS and how to alter them – David N Ruzic
Different types of ion probes applied for time resolved pulsed plasma diagnostics – Zdeněk Hubička
08:00 - 09:00 am UTC, Jan 21
Breakout room presentations, exhibits and mingling
09:00 - 10:00 am UTC, Jan 21
Invited presentations
Insights into HiPIMS electron properties and plasma instabilities via Thomson scattering – Sedina Tsikata
On the synthesis of titanium dioxide, from DCMS to Bipolar HiPIMS – Stéphanos Konstantinidis
Towards energy-efficient sputter-deposition: replacing the substrate heating requirements by irradiation with metal ions – Grzegorz Greczynski
10:00 - 11:00 am UTC, Jan 21
Breakout room presentations, exhibits and mingling
Day 3
Friday, Jan 22, 2021
06:00 - 07:00 am UTC, Jan 22
Breakout room presentations, exhibits and mingling
07:00 - 08:00 am UTC, Jan 22
Invited presentations
Characteristics and recent applications of the continuous high power magnetron sputtering – Zhongzhen Wu
Bipolar HIPIMS deposition of insulating films: the effect of surface charging – Michal Zanáška
Dynamic of HiPIMS discharges – energies, potentials and distribution functions – Achim von Keudell
08:00 - 09:00 am UTC, Jan 22
Breakout room presentations, exhibits and mingling
09:00 - 10:00 am UTC, Jan 22
Invited presentations
Superimposed high power impulse magnetron sputtering of titanium nitride coatings-Effect of target poisoning ratios and superimposed mid-frequency power – Jyh-Wei Lee
On the relation between deposition rate and ionized flux fraction in high power impulse magnetron sputtering – Jón Tomas Guðmundsson
Reactive HIPIMS for Industrial Processes – Ralf Bandorf
10:00 - 11:00 am UTC, Jan 22
Breakout room presentations, exhibits and mingling
Breakout room presentations
The presenters are asked to be present in their breakout room at a minimum two of the three “mingling” sessions
Day 1
06:00 - 11:00 am UTC, Jan 20
HiPIMS + Positive Pulse dynamic – Alban Sublet
Spoke-resolved plasma parameters in HiPIMS – Julian Held
Suppression of Interfacial Interdiffusion in Epitaxial Fe4N Deposited by HiPIMS – Nidhi Pandey
Influence of boron on the enhanced hardness and toughness of TiAlN coatings deposited by HiPIMS – Jose Antonio
Development of HiPIMS deposition technology using a cylindrical target surrounding a substrate for one-piece-flow coating – Hiroyuki Kousaka, Kouta Suematsu, Tatsuya Furuki
Magnetron sputtering into deep grooves – Pavel Mareš
Day 2
06:00 - 11:00 am UTC, Jan 21
Control of Spokes in Magnetron Discharges – Mathews George
Structural, electronic and magnetic properties of HiPIMS deposited Co4N films – Seema Seema
Optimization of accelerated ion fraction in bipolar HiPIMS – Rommel Paulo Viloan
Measurement of nitrogen atom density using vacuum ultraviolet absorption spectroscopy in TiN-HiPIMS – Takayuki Ohta, Masayuki Nakamura, Keigo Takeda
Day 3
06:00 - 11:00 am UTC, Jan 22
Study of (Ti,Zr)C:H/a-C:H nanocomposite thin film formation by low temperature reactive high power impulse magnetron sputtering – Sven Ulrich, Christian Poltorak
Pt nanoparticles by sputtering onto glycerol: effect of the argon pressure – Amaël Caillard
Time-resolved sputtered species number density in Ar/N2 HiPIMS – Katarína Bernátová
Alumina metallization in a hot target magnetron deposition process – Andrey Kaziev
Synthesis of boron carbon nitride coatings using HiPIMS with synchronized substrate bias – Tetsuhide Shimizu, Miki Kikuta, Naoto Hayakawa, Ming Yang
Exhibitor presentations
These presentations will be made in the exhibitors breakout room
Day 1
10:05 - 10:30 am UTC, Jan 20
HiPIMS pulsers with built in reactive sputter control – Rafael Sanchez, Ionautics
Day 2
08:00 - 09:00 am UTC, Jan 21
Different HiPIMS solutions offered by Nano4Energy : from cutting-edge research to industrial process implementation – Ivan Fernandez, Nano4Energy
Day 3
08:00 - 09:00 am UTC, Jan 22
Exploring full range of HIPIMS applications with (versatile) HIPIMS systems of Magpuls – Dieter Schorn, Magpuls
10:00 - 11:00 am UTC, Jan 22
Unique process control with PLASUS systems: Simultaneous adjustment of ionization and stoichiometry in reactive HIPIMS processes – Thomas Schütte, PLASUS
Exhibitors
Sponsors
About The Event Organizer
This workshop is organised by three well recognised scientist in the field of HiPIMS; Ulf Helmersson and Daniel Lundin at Linköping University Sweden and by 清水 徹英 (Tetsuhide SHIMIZU) at Tokyo Metropolitan University. Contact the organizers through: contact@hipims.today