An Online Meeting, January 20-22, 2021

Recent Developments in
High-Power Impulse Magnetron Sputtering

The 96th IUVSTA Workshop

REGISTRATION IS CLOSED!

About The Event

Scope of the meeting

This workshop, held on an online platform, will deal with recent development of high-power impulse magnetron sputtering (HiPIMS). It will provide a networking environment with oral presentations, poster presentations and exhibits. The virtual platform will allow you to interaction with the invited speakers and all other participants of the workshop.

Invited contributions

Seventeen high-profile researchers in the field of HiPIMS has been invited. They will give oral presentations. You will be able to interaction with the speakers, as with all participants of the workshop.

contributions

All non-invited scientific participants are offered the possibility to make a breakout room presentation. You will be assigned your own room where you can share your material in any form you like.

Exhibition

The workshop will give companies active in the field the possibility to present and interact with potential customers for a small fee. Contact the organizers for more information (contact@hipims.today) or register below, and we will contact you.

how?

We will use Zoom. Invited speakers, contributing presenter and exhibitors will be assigned their own breakout rooms during the time between the oral sessions. Participants will be able to move themselves between the rooms and have discussions in smaller groups. To be able to move between breakout rooms you need to use a desktop client or mobile app, version 5.3.0 or higher. The Zoom web client will not work. 

The workshop is free of charge for scientists and engineers developing HiPIMS. A fee is applicable for exhibitors and salespersons.

Number of registrations: REGISTRATION IS CLOSED

  • 17 invited speakers
  • 15 contributed “breakout room” presentations
  • 1 main sponsor (IUVSTA) and 4 other sponsors
  • 4 exhibiting companies
  •  290 participants in total

These Are

Our Speakers

Click the name of the speaker and you are coming to a site selected by the speaker.

Jyh-Wei Lee

SEDINA TSIKATA

jón tomas guðmundsson

zdeněk hubička

Ralf Bandorf

ACHIM VON KEUDELL

Gregory Abadias

The Program

Day 1

Wednesday, Jan 20, 2021

06:00 - 07:00 am UTC, Jan 20

Breakout room presentations, exhibits and mingling

07:00 - 08:00 am UTC, Jan 20

Opening of the Workshop

Ulf Helmersson, Tetsuhide SHIMIZU, Daniel Lundin

Invited presentations

An overview of the ground state particle behavior in HiPIMS discharge family – Nikolay Britun

Plasma characteristics in the near-floating substrate region in bipolar HiPIMS: Effect of pulsing configuration and magnetic balance degree – Vasile Tiron

08:00 - 09:00 am UTC, Jan 20

Breakout room presentations, exhibits and mingling

09:00 - 10:00 am UTC, Jan 20

Invited presentations

Time-resolved ion energy distributions and plasma potential in bipolar HiPIMS: effect of positive pulse length and delay – Tomáš Kozák

On the description of metal ion return in reactive high power impulse magnetron sputtering – Tomas Kubart 

Impact of ionized species on the nucleation stage and stress development in sputtered thin films – Gregory Abadias

10:00 - 11:00 am UTC, Jan 20

Breakout room presentations, exhibits and mingling

Day 2

Thursday, Jan 21, 2021

06:00 - 07:00 am UTC, Jan 21

Breakout room presentations, exhibits and mingling

07:00 - 08:00 am UTC, Jan 21

Invited presentations

Ups and downs of HiPIMS for the deposition of nanocomposite hard thin films – Petr Vašina

Energy distributions in HIPIMS and how to alter them – David N Ruzic

Different types of ion probes applied for time resolved pulsed plasma diagnostics – Zdeněk Hubička

 

08:00 - 09:00 am UTC, Jan 21

Breakout room presentations, exhibits and mingling

09:00 - 10:00 am UTC, Jan 21

Invited presentations

Insights into HiPIMS electron properties and plasma instabilities via Thomson scattering – Sedina Tsikata

On the synthesis of titanium dioxide, from DCMS to Bipolar HiPIMS – Stéphanos Konstantinidis

Towards energy-efficient sputter-deposition: replacing the substrate heating requirements by irradiation with metal ions – Grzegorz Greczynski

10:00 - 11:00 am UTC, Jan 21

Breakout room presentations, exhibits and mingling

Day 3

Friday, Jan 22, 2021

06:00 - 07:00 am UTC, Jan 22

Breakout room presentations, exhibits and mingling

07:00 - 08:00 am UTC, Jan 22

Invited presentations

Characteristics and recent applications of the continuous high power magnetron sputtering – Zhongzhen Wu

Bipolar HIPIMS deposition of insulating films: the effect of surface charging – Michal Zanáška

Dynamic of HiPIMS discharges – energies, potentials and distribution functions – Achim von Keudell

08:00 - 09:00 am UTC, Jan 22

Breakout room presentations, exhibits and mingling

09:00 - 10:00 am UTC, Jan 22

Invited presentations

Superimposed high power impulse magnetron sputtering of titanium nitride coatings-Effect of target poisoning ratios and superimposed mid-frequency powerJyh-Wei Lee

On the relation between deposition rate and ionized flux fraction in high power impulse magnetron sputteringJón Tomas Guðmundsson

Reactive HIPIMS for Industrial Processes – Ralf Bandorf

10:00 - 11:00 am UTC, Jan 22

Breakout room presentations, exhibits and mingling

Breakout room presentations

The presenters are asked to be present in their breakout room at a minimum two of the three “mingling” sessions

Day 1

06:00 - 11:00 am UTC, Jan 20

HiPIMS + Positive Pulse dynamic – Alban Sublet

Spoke-resolved plasma parameters in HiPIMS – Julian Held

Suppression of Interfacial Interdiffusion in Epitaxial Fe4N Deposited by HiPIMS – Nidhi Pandey

Influence of boron on the enhanced hardness and toughness of TiAlN coatings deposited by HiPIMS – Jose Antonio

Development of HiPIMS deposition technology using a cylindrical target surrounding a substrate for one-piece-flow coatingHiroyuki Kousaka,  Kouta Suematsu, Tatsuya Furuki

Magnetron sputtering into deep grooves – Pavel Mareš

Day 2

06:00 - 11:00 am UTC, Jan 21

Control of Spokes in Magnetron Discharges – Mathews George

Structural,  electronic and magnetic properties of HiPIMS deposited Co4N films – Seema Seema

Optimization of accelerated ion fraction in bipolar HiPIMS – Rommel Paulo Viloan

Measurement of nitrogen atom density using vacuum ultraviolet absorption spectroscopy in TiN-HiPIMSTakayuki Ohta, Masayuki Nakamura, Keigo Takeda

Day 3

06:00 - 11:00 am UTC, Jan 22

Study of (Ti,Zr)C:H/a-C:H nanocomposite thin film formation by low temperature reactive high power impulse magnetron sputtering – Sven Ulrich, Christian Poltorak

Pt nanoparticles by sputtering onto glycerol: effect of the argon pressure – Amaël Caillard

Time-resolved sputtered species number density in Ar/N2 HiPIMS – Katarína Bernátová

Alumina metallization in a hot target magnetron deposition processAndrey Kaziev

Synthesis of boron carbon nitride coatings using HiPIMS with synchronized substrate biasTetsuhide Shimizu, Miki Kikuta, Naoto Hayakawa, Ming Yang

Exhibitor presentations

These presentations will be made in the exhibitors breakout room

Day 1

10:05 - 10:30 am UTC, Jan 20

HiPIMS pulsers with built in reactive sputter control – Rafael Sanchez, Ionautics

Day 2

08:00 - 09:00 am UTC, Jan 21

Different HiPIMS solutions offered by Nano4Energy : from cutting-edge research to industrial process implementation – Ivan Fernandez, Nano4Energy

 

 

Day 3

08:00 - 09:00 am UTC, Jan 22

Exploring full range of HIPIMS applications with (versatile) HIPIMS systems of Magpuls – Dieter Schorn, Magpuls

10:00 - 11:00 am UTC, Jan 22

Unique process control with PLASUS systems: Simultaneous adjustment of ionization and stoichiometry in reactive HIPIMS processes – Thomas Schütte, PLASUS

Exhibitors

Sponsors

About The Event Organizer

This workshop is organised by three well recognised scientist in the field of HiPIMS; Ulf Helmersson and Daniel Lundin at Linköping University Sweden and by 清水 徹英 (Tetsuhide SHIMIZU) at Tokyo Metropolitan University. Contact the organizers through: contact@hipims.today

Tetsuhide SHIMIZU

Daniel Lundin

Ulf Helmersson